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Journal description
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Details for article 19 of 19 found articles
| Title: |
X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy |
| Author: |
Kalaiselvi, S.M.P. Tan, T.L. Talebitaher, A. Lee, P. Heussler, S.P. Breese, M.B.H. Rawat, R.S. |
| Appeared in: |
Physics letters. A |
| Paging: | Volume 379 (2015) nr. 6 pages 10 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 19 found articles
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