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Journal description
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Details for article 42 of 128 found articles
| Title: |
Effects of humidity on nano-oxidation of silicon nitride thin film |
| Author: |
Hsu, Hsun-Feng Lee, Chien-Wei |
| Appeared in: |
Ultramicroscopy |
| Paging: | Volume 108 (2008) nr. 10 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 42 of 128 found articles
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