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Journal description
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Details for article 18 of 21 found articles
| Title: |
Reducing the aspect ratio of contact holes by in situ low-angle cross sectioning |
| Author: |
Scheithauer, Uwe |
| Appeared in: |
Journal of electron spectroscopy and related phenomena |
| Paging: | Volume 202 (2015) nr. C pages 112-114 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 21 found articles
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