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Journal description
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Details for article 3 of 20 found articles
| Title: |
Average flow model with elastic deformation for CMP |
| Author: |
Kim, Tae-Wan Cho, Yong-Joo |
| Appeared in: |
Tribology international |
| Paging: | Volume 39 (2006) nr. 11 pages 7 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 20 found articles
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