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Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives |
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Titel: |
Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives |
Auteur: |
Zhu, Xiaoxiao Gui, Yuziyu Fu, Hao Ding, Juxuan Mo, Zhangchao Jiang, Xuesong Sun, Jifei Ban, Boyuan Wang, Ling Chen, Jian |
Verschenen in: |
Tribology international |
Paginering: |
Jaargang 197 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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