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  Influence of anisotropy on material removal and deformation mechanism based on nanoscratch tests of monocrystal silicon
 
 
Title: Influence of anisotropy on material removal and deformation mechanism based on nanoscratch tests of monocrystal silicon
Author: Tao, Hongfei
Zeng, Qinyang
Liu, Yuanhang
Zhao, Dewen
Lu, Xinchun
Appeared in: Tribology international
Paging: Volume 187 () nr. C pages p.
Year: 2023
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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