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Journal description
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Details for article 4 of 16 found articles
| Title: |
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process |
| Author: |
Noh, Kwang-Chul Oh, Myung-Do Lee, Seung-Chul |
| Appeared in: |
Building and environment |
| Paging: | Volume 40 (2005) nr. 11 pages 10 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 16 found articles
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