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Journal description
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Details for article 23 of 25 found articles
| Title: |
Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems |
| Author: |
Herfst, R.W. Klop, W.A. Eschen, M. van den Dool, T.C. Koster, N.B. Sadeghian, H. |
| Appeared in: |
Measurement |
| Paging: | Volume 56 (2014) nr. C pages 13 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 25 found articles
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