|
An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement |
|
|
|
Titel: |
An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement |
Auteur: |
Gao, Wendi Liu, Cunlang Liu, Tao Zhao, Libo Wang, Chenying Shakoor, Adnan Luo, Tao Jing, Weixuan Yang, Ping Lin, Qijing He, Yongqing Dong, Tao Jiang, Zhuangde Sun, Dong |
Verschenen in: |
Measurement |
Paginering: |
Jaargang 200 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
|
Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|