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Journal description
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Details for article 39 of 58 found articles
| Title: |
Machine learning aided solution to the inverse problem in optical scatterometry |
| Author: |
Liu, Shuo Chen, Xiuguo Yang, Tianjuan Guo, Chunfu Zhang, Jiahao Ma, Jianyuan Chen, Chao Wang, Cai Zhang, Chuanwei Liu, Shiyuan |
| Appeared in: |
Measurement |
| Paging: | Volume 191 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 39 of 58 found articles
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