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Journal description
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Details for article 47 of 68 found articles
| Title: |
Nonparametric estimation of SiC film residual stress from the wafer surface profile |
| Author: |
Savchuk, Olga Volinsky, Alex A. |
| Appeared in: |
Measurement |
| Paging: | Volume 177 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 47 of 68 found articles
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