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Journal description
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Details for article 23 of 50 found articles
| Title: |
Fast scatterometric measurement of periodic surface structures in plasma-etching processes |
| Author: |
Klesse, Wolfgang Matthias Rathsfeld, Andreas Groß, Claudine Malguth, Enno Skibitzki, Oliver Zealouk, Lahbib |
| Appeared in: |
Measurement |
| Paging: | Volume 170 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 50 found articles
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