Fabrication of a thin silicon detector with excellent thickness uniformity
Titel:
Fabrication of a thin silicon detector with excellent thickness uniformity
Auteur:
Valtonen, E. Eronen, T. Nenonen, S. Andersson, H. Miikkulainen, K. Eränen, S. Ronkainen, H. Mäkinen, J. Husu, H. Lassila, A. Punkkinen, R. Hirvonen, M.
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment