Scribe–cleave–passivate (SCP) slim edge technology for silicon sensors
Titel:
Scribe–cleave–passivate (SCP) slim edge technology for silicon sensors
Auteur:
Fadeyev, V. Sadrozinski, H.F.-W. Ely, S. Wright, J.G. Christophersen, M. Phlips, B.F. Pellegrini, G. Grinstein, S. Dalla Betta, G.-F. Boscardin, M. Klingenberg, R. Wittig, T. Macchiolo, A. Weigell, P. Creanza, D. Bates, R. Blue, A. Eklund, L. Maneuski, D. Stewart, G. Casse, G. Gorelov, I. Hoeferkamp, M. Metcalfe, J. Seidel, S. Kramberger, G.
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment