Development of a high-performance gantry system for a new generation of optical slope measuring profilers
Titel:
Development of a high-performance gantry system for a new generation of optical slope measuring profilers
Auteur:
Assoufid, Lahsen Brown, Nathan Crews, Dan Sullivan, Joseph Erdmann, Mark Qian, Jun Jemian, Pete Yashchuk, Valeriy V. Takacs, Peter Z. Artemiev, Nikolay A. Merthe, Daniel J. McKinney, Wayne R. Siewert, Frank Zeschke, Thomas
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment