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Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers |
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Titel: |
Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers |
Auteur: |
Barber, Samuel K. Anderson, Erik D. Cambie, Rossana McKinney, Wayne R. Takacs, Peter Z. Stover, John C. Voronov, Dmitriy L. Yashchuk, Valeriy V. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 616 (2010) nr. 2-3 pagina's 11 p. |
Jaar: |
2010 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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