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Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy |
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Titel: |
Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy |
Auteur: |
Chkhalo, N.I. Kluenkov, E.B. Pestov, A.E. Polkovnikov, V.N. Raskin, D.G. Salashchenko, N.N. Suslov, L.A. Toropov, M.N. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 603 (2009) nr. 1-2 pagina's 4 p. |
Jaar: |
2009 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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