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Fabrication of microstructured optical elements for visible light by means of LIGA-technology |
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Titel: |
Fabrication of microstructured optical elements for visible light by means of LIGA-technology |
Auteur: |
Goldenberg, B.G. Pindyurin, V.F. Ancharova, U.V. Eliseev, V.S. Petrova, E.V. Korolkov, V.P. Nasyrov, R.K. Nikanorov, N.Y. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 603 (2009) nr. 1-2 pagina's 3 p. |
Jaar: |
2009 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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