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Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging |
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Title: |
Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging |
Author: |
Aliane, A. Agnese, P. Pigot, C. Sauvageot, J.-L. de Moro, F. Ribot, H. Gasse, A. Szeflinski, V. Gobil, Y. |
Appeared in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paging: |
Volume 594 (2008) nr. 2 pages 5 p. |
Year: |
2008 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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