Development of ultra-low impedance Through-wafer Micro-vias
Titel:
Development of ultra-low impedance Through-wafer Micro-vias
Auteur:
Finkbeiner, F.M. Adams, C. Apodaca, E. Chervenak, J.A. Fischer, J. Doan, N. Li, M.J. Stahle, C.K. Brekosky, R.P. Bandler, S.R. Figueroa-Feliciano, E. Lindeman, M.A. Kelley, R.L. Saab, T. Talley, D.J.
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment