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A Deep X-ray Lithography beamline at the Kurchatov Synchrotron Radiation Source: First results |
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Titel: |
A Deep X-ray Lithography beamline at the Kurchatov Synchrotron Radiation Source: First results |
Auteur: |
Artemiev, A.N. Bushev, I.N. Kolyasnikov, V.A. Kovachov, G.A. Latish, O.E. Martynenko, V.V. Moryakov, V.P. Nikitin, B.I. Odintsov, D.G. Peredkov, S.S. Rakhimbabaev, T.Y. Stankevitch, V.G. Tzvid, E.S. Schmidt, M. Schmidt, A. Feiertag, G. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 405 (1998) nr. 2-3 pagina's 4 p. |
Jaar: |
1998 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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