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An UHV box coater for VUV reflective coatings on mirror substrates of up to 95 cm in diameter |
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Titel: |
An UHV box coater for VUV reflective coatings on mirror substrates of up to 95 cm in diameter |
Auteur: |
Maier-Komor, P Bergmaier, A Dollinger, G Friese, J Karsch, S Kienle, P Körner, H.J |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 397 (1997) nr. 1 pagina's 6 p. |
Jaar: |
1997 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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