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Miniature low voltage beam systems producable by combined lithographies |
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Titel: |
Miniature low voltage beam systems producable by combined lithographies |
Auteur: |
Koops, Hans W.P. Munro, Eric Rouse, John Kretz, Johannes Rudolph, Michael Weber, Markus Dahm, Gerold |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 363 (1995) nr. 1-2 pagina's 9 p. |
Jaar: |
1995 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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