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Preliminary experience of optical elements fabrication by X-ray lithography |
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Titel: |
Preliminary experience of optical elements fabrication by X-ray lithography |
Auteur: |
Churin, E.G Koronkevich, V.P Kulipanov, G.N Makarov, O.A Mezentseva, L.A Naz'mov, V.P Pindyurin, V.F |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 359 (1995) nr. 1-2 pagina's 3 p. |
Jaar: |
1995 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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