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Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer |
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Titel: |
Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer |
Auteur: |
Hietanen, Iiro Lindgren, Jukka Orava, Risto Tuuva, Tuure Voutilainen, Martti Brenner, Richard Andersson, Mikael Leinonen, Kari Ronkainen, Hannu |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 310 (1991) nr. 3 pagina's 6 p. |
Jaar: |
1991 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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