From simulation to fabrication: Realizing silicon crystalline undulators with silicon nitride stressor layer patterning
Titel:
From simulation to fabrication: Realizing silicon crystalline undulators with silicon nitride stressor layer patterning
Auteur:
Malagutti, L. Bandiera, L. Bonafè, F. Canale, N. De Salvador, D. Fedeli, P. Garrido, J. Reyes Guidi, V. Lanzoni, L. Korol, A.V. Mancarella, F. Negrello, R. Paternò, G. Romagnoni, M. Sgarbossa, F. Solov’yov, A.V. Sytov, A. Valzani, D. Mazzolari, A.
Verschenen in:
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment