|
Development of silicon interposers with embedded microchannels and metal re-distribution layer for the integration of hybrid detector systems |
|
|
|
Titel: |
Development of silicon interposers with embedded microchannels and metal re-distribution layer for the integration of hybrid detector systems |
Auteur: |
Ullán, Miguel Correa, Jonathan Dauderys, Vainius Díez, Sergio Duch, Marta López, Luis Martínez, Leyre Mas, Roser Moreno, Alberto |
Verschenen in: |
Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
Paginering: |
Jaargang 1065 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
|
Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|