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EPR, XRD and optical reflectivity studies of radiation damage in silicon after high energy implantation of Ni ions |
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Title: |
EPR, XRD and optical reflectivity studies of radiation damage in silicon after high energy implantation of Ni ions |
Author: |
Varichenko, V.S. Zaitsev, A.M. Lindner, J.K.N. Domres, R. Penina, N.M. Erchak, D.P. Chelyadinskii, A.R. Martinovitsh, V.A. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 94 (1994) nr. 3 pages 5 p. |
Year: |
1994 |
Contents: |
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Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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