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                                       Details for article 5 of 23 found articles
 
 
  Control system for a 300 kV ion implanter
 
 
Title: Control system for a 300 kV ion implanter
Author: Martin, Jaime M.
González-Díaz, Germán
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 88 (1994) nr. 3 pages 7 p.
Year: 1994
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 23 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands