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Journal description
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Details for article 30 of 73 found articles
| Title: |
Formation of excellent shallow n+ junctions by As+ implantation into thin CoSi films on Si substrate |
| Author: |
Lin, C.T. Juang, M.H. Chu, C.H. Cheng, H.C. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 74 (1993) nr. 1-2 pages 4 p. |
| Year: |
1993 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 30 of 73 found articles
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