Defect engineering of p+-junctions by multiple-species ion implantation
Titel:
Defect engineering of p+-junctions by multiple-species ion implantation
Auteur:
Current, M.I. Inoue, M. Nakashima, S. Ohno, N. Kuribara, M. Matsunaga, Y. Hara, T. Wagner, D. Leung, S. Adibi, B. Lecouras, G. Larson, L.A. Prussin, S.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms