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Ion microprobe system combined with scanning electron microscope for high precision aiming |
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Titel: |
Ion microprobe system combined with scanning electron microscope for high precision aiming |
Auteur: |
Ohdomari, I. Sugimori, M. Koh, M. Noritake, K. Takiguchi, Y. Shimizu, H. Tanaka, R. Kamiya, T. Utsunomiya, N. Minehara, E. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 72 (1992) nr. 3-4 pagina's 6 p. |
Jaar: |
1992 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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