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  A cellular automata simulation study of surface roughening resulting from multi-atom etch pit generation during sputtering
 
 
Title: A cellular automata simulation study of surface roughening resulting from multi-atom etch pit generation during sputtering
Author: Toh, Y.S.
Nobes, M.J.
Carter, G.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 67 (1992) nr. 1-4 pages 4 p.
Year: 1992
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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 Koninklijke Bibliotheek - National Library of the Netherlands