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Journal description
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Details for article 2 of 26 found articles
| Title: |
Channeling effects in high energy implantation of N+ in silicon |
| Author: |
Gasparotto, A. Carnera, A. Acco, S. La Ferla, A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 62 (1992) nr. 3 pages 5 p. |
| Year: |
1992 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 26 found articles
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