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                                       Details for article 34 of 74 found articles
 
 
  Implementation of an automatic setup for ion beam implanters
 
 
Title: Implementation of an automatic setup for ion beam implanters
Author: Splinter, P.
Krasnakevich, C.
Felsenthal, D.
Garvey, E.
Gagne, G.
Lindsey, D.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 6 (1985) nr. 1-2 pages 10 p.
Year: 1985
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 34 of 74 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands