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                                       Details for article 15 of 39 found articles
 
 
  Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing
 
 
Title: Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing
Author: Fugger, Andrea
Jelinek, Moriz
Valtiner, Markus
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 566 () nr. C pages p.
Year: 2025
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 39 found articles
 
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