|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 10 of 39 found articles
| Title: |
Development of plasma flood gun for low energy and high current ion implanter |
| Author: |
Kurauchi, Taido Hahto, Sami K. Sacco, George Matsumoto, Takeshi Hamamoto, Nariaki |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 566 () nr. C pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 39 found articles
| << previous | next >> |