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                                       Details for article 7 of 20 found articles
 
 
  Development of imprint mold with F+ ion implantation for detachability
 
 
Title: Development of imprint mold with F+ ion implantation for detachability
Author: Komiya, Kazuki
Teranishi, Yoshikazu
Yamaoka, Hidehiko
Date, Shuichi
Yang, Ming
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 565 () nr. C pages p.
Year: 2025
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 20 found articles
 
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