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Journal description
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Details for article 22 of 184 found articles
| Title: |
Annealing behaviour of BF2 + implanted (001) and (111) Si inside miniature size oxide openings |
| Author: |
Nieh, C.W. Chen, L.J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 55 (1991) nr. 1-4 pages 5 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 184 found articles
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