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Structural disorder and distribution of impurity atoms in β-Ga2O3 under boron ion implantation |
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Titel: |
Structural disorder and distribution of impurity atoms in β-Ga2O3 under boron ion implantation |
Auteur: |
Nikolskaya, A.A. Korolev, D.S. Trushin, V.N. Drozdov, M.N. Yunin, P.A. Pitirimova, E.A. Kudrin, A.V. Okulich, E.V. Okulich, V.I. Mikhaylov, A.N. Tetelbaum, D.I. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 537 () nr. C pagina's 65-70 |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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