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Raman scattering studies of low energy Ar+ ion implanted monocrystalline silicon for synchrotron applications |
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Title: |
Raman scattering studies of low energy Ar+ ion implanted monocrystalline silicon for synchrotron applications |
Author: |
Kumar, N. Volodin, V.A. Goryainov, S.V. Chernyshev, A.K. Kozakov, A.T. Scrjabin, A.A. Chkhalo, N.I. Mikhailenko, M.S. Pestov, A.E. Zorina, M.V. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 534 () nr. C pages 97-102 |
Year: |
2023 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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