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Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film |
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Titel: |
Radiation effects on He+- and H+-implantation for ion slicing of rutile titanium dioxide thin film |
Auteur: |
Ma, Yujie Lin, Senhua Qiu, Yizhi Zheng, Xinzhi Yu, Mingyoung Xiang, Bingxi Xu, Fang Lu, Fei Zhou, Cangtao Ruan, Shuangchen |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 533 () nr. C pagina's 1-8 |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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