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Journal description
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Details for article 8 of 10 found articles
| Title: |
Sputter hot filament hollow cathode ion source and its application to ultra-low energy ion implantation in 2D materials |
| Author: |
Junge, Felix Auge, Manuel Hofsäss, Hans |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 510 () nr. C pages 63-68 |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 10 found articles
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