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                                       Details for article 7 of 91 found articles
 
 
  Analysis of annealing and ion implantation effects in Ti/TiN contacts on silicon
 
 
Title: Analysis of annealing and ion implantation effects in Ti/TiN contacts on silicon
Author: Milosavljević, Momir
Bibić, Nataša
Perus̃ko, Davor
Stojanović, Marko S.
Wilson, ian H.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 50 (1990) nr. 1-4 pages 4 p.
Year: 1990
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 91 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands