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Automation of multi-modal beam focusing of an MeV sub-microprobe for ion beam analysis |
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Title: |
Automation of multi-modal beam focusing of an MeV sub-microprobe for ion beam analysis |
Author: |
Matsuyama, Shigeo Miwa, Misako Kada, Wataru Kitayama, Yoshiharu Toyama, Sho Kikuchi, Yohei Numao, Kazuya Takai, Yuta Sato, Yuta Seki, Daiki Kasahara, Kazuto |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 496 () nr. C pages 1-8 |
Year: |
2021 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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