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GaN nanocrystals obtained by Ga and N implantations and thermal treatment under N2 into SiO2/Si and SiNx/Si wafers |
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Title: |
GaN nanocrystals obtained by Ga and N implantations and thermal treatment under N2 into SiO2/Si and SiNx/Si wafers |
Author: |
Aggar, L. Bradai, D. Bourezg, Y.I. Abdesselam, M. Chami, A.C. Mocuta, C. Thiaudiere, D. Speisser, C. Muller, D. Bouillet, C. Le Normand, F. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 485 () nr. C pages 57-67 |
Year: |
2020 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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