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Recrystallization effects in GeV Bi ion implanted 4H-SiC Schottky barrier diode investigated by cross-sectional Micro-Raman spectroscopy |
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Titel: |
Recrystallization effects in GeV Bi ion implanted 4H-SiC Schottky barrier diode investigated by cross-sectional Micro-Raman spectroscopy |
Auteur: |
Huang, Mingmin Yang, Zhimei Wang, Shaomin Liu, Jiyuan Gong, Min Ma, Yao Liu, Jie Zhai, Pengfei Sun, Youmei Li, Yun |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 478 () nr. C pagina's 5-10 |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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