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Details for article 1 of 15 found articles
| Title: |
An investigation on structures and strains of gas-ion-implanted and post-implantation-annealed SiC |
| Author: |
Zhang, L.Q. Chen, Y.G. Liu, H.P. Kang, L. Zhang, T.M. Li, J.Y. Xu, C.L. Zhang, X.L. Li, J.Y. Ding, Z.N. Zhang, C.H. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 474 () nr. C pages 15-22 |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 15 found articles
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