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Temperature dependence of dislocation-related photoluminescence (D1) of self-implanted silicon subjected to additional boron implantation |
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Titel: |
Temperature dependence of dislocation-related photoluminescence (D1) of self-implanted silicon subjected to additional boron implantation |
Auteur: |
Nikolskaya, Alena Korolev, Dmitry Tereshchenko, Alexey Pavlenkov, Vladimir Nagornykh, Sergey Belov, Alexey Vasiliev, Valery Mikhaylov, Alexey Tetelbaum, David |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 472 () nr. C pagina's 32-35 |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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