Radiation resistance of nanolayered silicon nitride capacitors
Titel:
Radiation resistance of nanolayered silicon nitride capacitors
Auteur:
Romanova, Marina Avotina, Liga Andrulevicius, Mindaugas Dekhtyar, Yuri Enichek, Gennady Kizane, Gunta Novotný, Michal Pajuste, Elina Pokorný, Petr Yager, Tom Zaslavski, Aleksandr
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms